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Proximal probe-like nano structuring in metal-assisted etching of silicon
(American Institute of Physics Inc., 2019)
We use silicon having multiple crystalline orientation domains and high metal doping in metal assisted chemical etching (MACEtch) in HF/H2O2. In device-quality silicon, MACEtch produces high-aspect ratio anisotropic (1-D) ...
Wet non-thermal integration of nano binary silicon-gold system with strong plasmonic and luminescent characteristics
(Amer Inst Physics, 2019)
We report on a wet none thermal integration of the binary silicon-gold nano system. Instead of thermally based gas-solid procedures, we use charge exchange/injection-based procedures in a chemical wet environment. SEM and ...
