Ara
Toplam kayıt 1, listelenen: 1-1
Proximal probe-like nano structuring in metal-assisted etching of silicon
(American Institute of Physics Inc., 2019)
We use silicon having multiple crystalline orientation domains and high metal doping in metal assisted chemical etching (MACEtch) in HF/H2O2. In device-quality silicon, MACEtch produces high-aspect ratio anisotropic (1-D) ...