Show simple item record

dc.contributor.authorBahçeci, Ersin
dc.contributor.authorEnders, Brian
dc.contributor.authorYamani, Zain Hassan
dc.contributor.authorTokmoldin, Serekbol
dc.contributor.authorTaukenov, Aman
dc.contributor.authorAbuhassan, Laila
dc.contributor.authorNayfeh, Munir
dc.date.accessioned2019-07-04T13:16:51Z
dc.date.available2019-07-04T13:16:51Z
dc.date.issued2019en_US
dc.identifier.citationBahceci, E., Enders, B., Yamani, Z., Tokmoldin, S., Taukenov, A., Abuhassan, L., Nayfeh, M. (2019). Proximal Probe-like Nano Structuring in Metal-assisted Etching of Silicon. AIP Advances. 9(5), 055228. https://doi.org/10.1063/1.5096659en_US
dc.identifier.urihttps://doi.org/10.1063/1.5096659
dc.identifier.urihttps://hdl.handle.net/20.500.12508/400
dc.description.abstractWe use silicon having multiple crystalline orientation domains and high metal doping in metal assisted chemical etching (MACEtch) in HF/H2O2. In device-quality silicon, MACEtch produces high-aspect ratio anisotropic (1-D) structures (wires, columns, pores or holes) and to a lesser degree non-high-aspect ratio luminescent (0-D) nano structures. While the 1-D structure symmetry is understood in terms of crystallography axis-dependent etching, predominantly along the <100> direction, the isotropic 0-D spherical symmetry etching is not understood. We observe in silicon having multiple crystalline orientation domains formation of metal tips (needles or whiskers) of diameters as small as 2-3 nm that bridge the metal to silicon and cause AFM/STM-like nanofabrication, producing 0-D mounds, indentations, or clusters. The formation of sharp needles can be understood in terms of charge injection/electric breakdown between metal clusters and silicon due to charge build-up. Silicon with high degree of impurities as well as with multiple crystalline orientation domains allow imaging these effects using electron spectroscopy without cross sectional cuts.en_US
dc.language.isoengen_US
dc.publisherAmerican Institute of Physics Inc.en_US
dc.relation.isversionof10.1063/1.5096659en_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subject.classificationNanowires | Silicon solar cells | SiNW arraysen_US
dc.subject.classificationNanoscience & Nanotechnologyen_US
dc.subject.classificationMaterials Scienceen_US
dc.subject.classificationMultidisciplinaryen_US
dc.subject.classificationPhysicsen_US
dc.subject.classificationApplieden_US
dc.subject.otherAspect ratioen_US
dc.subject.otherCrystalline materialsen_US
dc.subject.otherElectron spectroscopyen_US
dc.subject.otherMetalsen_US
dc.subject.otherNanostructuresen_US
dc.subject.otherNeedlesen_US
dc.subject.otherSiliconen_US
dc.subject.other1-d structuresen_US
dc.subject.otherCrystalline orientationsen_US
dc.subject.otherHigh aspect ratioen_US
dc.subject.otherMetal assisted etchingsen_US
dc.subject.otherMetal-assisted chemical etchingen_US
dc.subject.otherNano-structuringen_US
dc.subject.otherProximal probesen_US
dc.subject.otherSpherical symmetryen_US
dc.subject.otherSpherical symmetryen_US
dc.subject.otherEtchingen_US
dc.subject.otherEngineeringen_US
dc.subject.otherPerformanceen_US
dc.subject.otherFabricationen_US
dc.titleProximal probe-like nano structuring in metal-assisted etching of siliconen_US
dc.typearticleen_US
dc.relation.journalAIP Advancesen_US
dc.contributor.departmentMühendislik ve Doğa Bilimleri Fakültesi -- Metalurji ve Malzeme Mühendisliği Bölümüen_US
dc.contributor.authorID0000-0002-7719-6051en_US
dc.contributor.authorID0000-0002-5284-4040en_US
dc.contributor.authorID0000-0002-6031-9385en_US
dc.contributor.authorID0000-0003-0633-4733en_US
dc.contributor.authorID0000-0002-1459-4976en_US
dc.identifier.volume9en_US
dc.identifier.issue5en_US
dc.identifier.startpage055228-1en_US
dc.identifier.endpage055228-7en_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.contributor.isteauthorBahçeci, Ersin
dc.relation.indexWeb of Science - Scopusen_US
dc.relation.indexWeb of Science Core Collection - Science Citation Index Expandeden_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record